Depth profile analysis with monolayer resolution using elastic recoil detection (ERD)
Technische Universität München,
Physik-Department E12, D-85747 Garching, Germany
Accepted: 3 February 1998
The conditions for obtaining optimum depth resolution in elastic recoil detection (ERD) analysis of thin films using high-energy heavy ions are investigated. We estimate the principle limits given by energy straggling and small-angle scattering effects and show that monolayer depth resolution can be expected under optimized experimental conditions. Such a resolution is demonstrated in an ERD experiment for the first time by discrete signals of adjacent (002) graphite layers which is obtained using a 60 MeV ion beam and detecting recoils with a magnetic spectrograph.
PACS: 34.50.Bw – Energy loss and stopping power / 07.81.+a – Electron, ion spectrometers, and related techniques / 61.66.Bi – Elemental solids
© EDP Sciences, 1998