Lehrstuhl für Biophysik, E22, Technische
James-Franck-Str. 1, D-85748 Garching, Germany
Accepted: 26 October 1999
We modified an optical microscope to enable quantitative ellipsometric studies with 1 nm height and 0.9 m lateral resolution. A beam of polarised light impinging on the object under a shallow angle of incidence is generated by focusing a pinhole into an off-axis point in the back focal plane of a high-power microscope objective. The entire image of the object is focused which greatly reduces stray light. In addition, this enables a drastic reduction of the measuring time. For thicknesses of organic films exceeding 20 nm both the film thickness and its refractive index may be determined simultaneously.
PACS: 07.60.Fs – Polarimeters and ellipsometers / 07.60.Pb – Conventional optical microscopes / 68.55.-a – Thin film structure and morphology
© EDP Sciences, 2000