Efficiency of cluster generation in a magnetron discharge
Joint Institute for High Temperatures, Russian Academy of Sciences - Izhorskaya 13, bldg. 2, Moscow 125412 Russia
2 Institut für Physik, Ernst-Moritz-Arndt Universität Greifswald - Felix-Hausdorff-Str. 6, 17489 Greifswald, Germany, EU
Accepted: 28 August 2010
The processes in the magnetron discharge involving metal atoms and metal clusters are analyzed. The efficiency of conversion of metal atoms in clusters is found in stationary magnetron discharge. The scheme of pulse magnetron discharge is considered with a variation of the buffer gas pressure after the electric pulse that provides an increase in the cluster generation efficiency in comparison with the stationary discharge.
PACS: 36.40.-c – Atomic and molecular clusters / 36.40.Sx – Diffusion and dynamics of clusters / 52.80.Sm – Magnetoactive discharges (e.g., Penning discharges)
© EPLA, 2010