Electron-beam–ignited, high-frequency–driven vacuum ultraviolet excimer light source
Physik Department E12, Technische Universität München - James-Franck-Str. 1, 85748 Garching, Germany, EU
2 Physik Department E15, Technische Universität München - James-Franck-Str. 1, 85748 Garching, Germany, EU
3 Optimare Analytik GmbH & Co KG. - Ems-Str. 20, 26382 Wilhelmshaven, Germany, EU
Accepted: 18 April 2011
Transformation of a table-top electron-beam–sustained 2.45 GHz RF discharge in rare gases into a self-burning discharge has been observed for increasing RF amplitude. Thereby, the emission spectrum undergoes significant changes in a wide spectral range from the vacuum ultraviolet (VUV) to the near infrared. A strong increase of VUV excimer emission is observed for the self-burning discharge. The so-called first excimer continuum, in particular, shows a drastic increase in intensity. For argon this effect results in a brilliant light source emitting near the 105 nm short-wavelength cutoff of LiF windows. The appearance of a broad-band continuum in the UV and visible range as well as effects of RF excitation on the atomic line radiation and the so-called third excimer continuum are briefly described.
PACS: 33.20.Ni – Vacuum ultraviolet spectra / 52.80.Pi – High-frequency and RF discharges / 34.80.Dp – Atomic excitation and ionization
© EPLA, 2011