| Issue |
EPL
Volume 98, Number 1, April 2012
|
|
|---|---|---|
| Article Number | 14004 | |
| Number of page(s) | 6 | |
| Section | Electromagnetism, Optics, Acoustics, Heat Transfer, Classical Mechanics, and Fluid Dynamics | |
| DOI | https://doi.org/10.1209/0295-5075/98/14004 | |
| Published online | 12 April 2012 | |
Dissipation of micro-cantilevers as a function of air pressure and metallic coating
1
Université de Lyon, Laboratoire de physique, ENS Lyon, CNRS - 46 Allée d'Italie, Lyon 69364, France, EU
2
Department of Physics, East China Normal University - 3663 Zhongshan North Rd., Shanghai 200062, China
Received:
30
October
2011
Accepted:
9
March
2012
In this letter, we characterize the internal dissipation of coated micro-cantilevers through their mechanical thermal noise. Using a home-made interferometric setup, we achieve a resolution down to 
in the measurement of their deflection. With the use of the fluctuation dissipation theorem and of the Kramers-Kronig relations, we rebuild the full mechanical response function from the measured noise spectrum, and investigate frequency-dependent dissipation as a function of the air pressure and of the nature of the metallic coatings. Using different thicknesses of gold coatings, we demonstrate that the internal viscoelastic damping is solely due to the dissipation in the bulk of the coating.
PACS: 46.35.+z – Viscoelasticity, plasticity, viscoplasticity / 05.40.Jc – Brownian motion / 07.10.Cm – Micromechanical devices and systems
© EPLA, 2012
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.