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Ion damage overrides structural disorder in silicon surface nanopatterning by low-energy ion beam sputtering

A. Moreno-Barrado, R. Gago, A. Redondo-Cubero, L. Vázquez, J. Muñoz-García, R. Cuerno, K. Lorenz and M. Castro

EPL, 109 4 (2015) 48003

DOI: https://doi.org/10.1209/0295-5075/109/48003

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