Improving mobility of silicon metal-oxide–semiconductor devices for quantum dots by high vacuum activation annealingKe Wang, Hai-Ou Li, Gang Luo, Xin Zhang, Fang-Ming Jing, Rui-Zi Hu, Yuan Zhou, He Liu, Gui-Lei Wang, Gang Cao, Hong-Wen Jiang and Guo-Ping GuoEPL, 130 2 (2020) 27001DOI: https://doi.org/10.1209/0295-5075/130/27001
