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On the anisotropy and thermalization of the metal sputtered atoms in a low-pressure magnetron discharge

L. de Poucques, C. Vitelaru, T. M. Minea, J. Bretagne and G. Popa

EPL, 82 1 (2008) 15002

DOI: https://doi.org/10.1209/0295-5075/82/15002

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