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Impact of thermal annealing on interfacial layer and electrical properties of a-SiN_x : H/Si

Sarab Preet Singh, G. Vijaya Prakash, S. Ghosh, Sanjay Rai and P. Srivastava

EPL, 90 2 (2010) 26002

DOI: https://doi.org/10.1209/0295-5075/90/26002

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