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Electron-beam–ignited, high-frequency–driven vacuum ultraviolet excimer light source

T. Dandl, H. Hagn, T. Heindl, R. Krücken, J. Wieser and A. Ulrich

EPL, 94 5 (2011) 53001

DOI: https://doi.org/10.1209/0295-5075/94/53001

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