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Strain investigation of low strained buried gratings by grazing incidence X-ray diffraction and elasticity theory

D. Lübbert, T. Baumbach, S. Ponti, U. Pietsch, L. Leprince, J. Schneck and A. Talneau

Europhys. Lett., 46 4 (1999) 479-485

DOI: https://doi.org/10.1209/epl/i1999-00288-6

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