EDP Sciences logo
Search
Menu
Article citations

Download citation

Fluence effect on ion-implanted Formula diffusion in relaxed Formula

P. Laitinen, J. Räisänen, I. Riihimäki, J. Likonen and E. Vainonen-Ahlgren
Europhys. Lett., 72 3 (2005) 416-422
DOI: https://doi.org/10.1209/epl/i2005-10257-1


Back to the article