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Ion damage overrides structural disorder in silicon surface nanopatterning by low-energy ion beam sputtering

A. Moreno-Barrado, R. Gago, A. Redondo-Cubero, L. Vázquez, J. Muñoz-García, R. Cuerno, K. Lorenz and M. Castro

EPL, 109 4 (2015) 48003

Published online: 26 February 2015

DOI: 10.1209/0295-5075/109/48003

A. Moreno-Barrado

R. Gago

A. Redondo-Cubero

L. Vázquez

J. Muñoz-García

R. Cuerno

K. Lorenz

M. Castro

Articles written by ALL the selected authors (AND)

Articles written by ANY OF the selected authors (OR)

Editor-in-Chief: Prof. Richard Blythe - Editorial board
ISSN: 0295-5075 - eISSN: 1286-4854
Frequency: semi-monthly
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