EPL

Efficiency of cluster generation in a magnetron discharge

P. V. Kashtanov, B. M. Smirnov and R. Hippler

EPL, 91 6 (2010) 63001

Published online: 06 October 2010

DOI: 10.1209/0295-5075/91/63001

P. V. Kashtanov

B. M. Smirnov

R. Hippler

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