EPL

Electron-beam–ignited, high-frequency–driven vacuum ultraviolet excimer light source

T. Dandl, H. Hagn, T. Heindl, R. Krücken, J. Wieser and A. Ulrich

EPL, 94 5 (2011) 53001

Published online: 23 May 2011

DOI: 10.1209/0295-5075/94/53001

T. Dandl

H. Hagn

T. Heindl

R. Krücken

J. Wieser

A. Ulrich

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