EPL

Spectroscopic measurements of phase-resolved electron energy distribution functions in RF-excited discharges

T. Gans, V. Schulz-von der Gathen and H. F. Döbele

Europhys. Lett., 66 2 (2004) 232-238

Published online: 01 April 2004

DOI: 10.1209/epl/i2003-10183-2

T. Gans

V. Schulz-von der Gathen

H. F. Döbele

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