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Numerical study of dual-frequency capacitively-coupled discharges in electronegative

L. Z. Tong and K. Nanbu

Europhys. Lett., 75 1 (2006) 63-69

Published online: 24 May 2006

DOI: 10.1209/epl/i2006-10068-x

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L. Z. Tong

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