EPL

Transport coefficients for electron scattering in CF₄/Ar/O₂ mixtures with a significant presence of F_x or CF_x radicals

Ž. Nikitović, V. Stojanović, Z. Lj. Petrović, U. Cvelbar and M. Mozetič

EPL, 91 5 (2010) 55001

Published online: 21 September 2010

DOI: 10.1209/0295-5075/91/55001

Ž. Nikitović

V. Stojanović

Z. Lj. Petrović

U. Cvelbar

M. Mozetič

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