EPL

Role of the Casimir force in micro- and nanoelectromechanical pressure sensors

G. L. Klimchitskaya, A. S. Korotkov, V. V. Loboda and V. M. Mostepanenko

EPL, 146 6 (2024) 66004

Published online: 15 July 2024

DOI: 10.1209/0295-5075/ad4fbb

G. L. Klimchitskaya

A. S. Korotkov

V. V. Loboda

V. M. Mostepanenko

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