AFM study of surface roughening in sputter-deposited nickel films on ITO glasses
Department of Mechanical Systems Engineering, University of the Ryukyus
1 Senbaru, Nishihara-cho Okinawa 903-0213 Japan
Accepted: 31 August 2000
We have studied the kinetic surface roughening of nickel films sputter-deposited on ITO glasses within a temperature range from 423 K to 573 K. The scaling exponents were determined by the surface measurements of AFM and compared with theoretical values in the surface diffusion-driven growth model.
PACS: 68.55.-a – Thin film structure and morphology / 81.15.Cd – Deposition by sputtering / 68.35.Ct – Interface structure and roughness
© EDP Sciences, 2000