-laser ablation and micro-patterning ofM. Peruzzi, J. D. Pedarnig, H. Sturm, N. Huber and D. Bäuerle
Angewandte Physik, Johannes-Kepler-Universität Linz - A-4040 Linz, Austria Johannes.Pedarnig@jku.at
(Received 7 November 2003; accepted in final form 11 December 2003)
Pulsed-laser ablation and micro-patterning of gallium orthophosphate ( ) single crystals and ceramics by 157 -laser radiation is reported. Micron-sized holes with sharp edges and smooth walls are obtained by employing projection-mask techniques. The threshold fluence of ablation is around and ablation rates of are achieved at fluence levels of for both material types.
42.55.Lt - Gas lasers including excimer and metal-vapor lasers.
42.62.-b - Laser applications.
52.38.Mf - Laser ablation.
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