Europhys. Lett.
Volume 65, Number 5, March 2004
Page(s) 652 - 657
Section Electromagnetism, optics, acoustics, heat transfer, classical mechanics, and fluid dynamics
Published online 01 February 2004
Europhys. Lett., 65 (5) , pp. 652-657 (2004)
DOI: 10.1209/epl/i2003-10159-2

$\chem{F_2}$-laser ablation and micro-patterning of $\chem{GaPO_4}$

M. Peruzzi, J. D. Pedarnig, H. Sturm, N. Huber and D. Bäuerle

Angewandte Physik, Johannes-Kepler-Universität Linz - A-4040 Linz, Austria

(Received 7 November 2003; accepted in final form 11 December 2003)

Pulsed-laser ablation and micro-patterning of gallium orthophosphate ( $\chem{GaPO_4}$) single crystals and ceramics by 157 $\un{nm}$ $\chem{F_2}$-laser radiation is reported. Micron-sized holes with sharp edges and smooth walls are obtained by employing projection-mask techniques. The threshold fluence of ablation is around $\Phi_{\ab{th}}\approx 180$ $\un{mJ/cm^2}$ and ablation rates of $W_{\ab{A}}\leq 90$ $\un{nm/pulse}$ are achieved at fluence levels of $\Phi\leq 2$ $\un{J/cm^2}$ for both material types.

42.55.Lt - Gas lasers including excimer and metal-vapor lasers.
42.62.-b - Laser applications.
52.38.Mf - Laser ablation.

© EDP Sciences 2004