Europhys. Lett.
Volume 72, Number 6, December 2005
Page(s) 915 - 921
Section General
Published online 23 November 2005
Europhys. Lett., 72 (6), pp. 915-921 (2005)
DOI: 10.1209/epl/i2005-10340-7

EUV scanning transmission microscope operating with high-harmonic and laser plasma radiation

R. Früke1, J. Kutzner2, 3, T. Witting2, 3, H. Zacharias2, 3 and Th. Wilhein1

1  University of Applied Sciences Koblenz, RheinAhrCampus Remagen Institute for X-optics - Südallee 2, 53424 Remagen, Germany
2  Westfälische Wilhelms-Universität Münster, Physikalisches Institut Wilhelm-Klemm-Straße 10, 48149 Münster, Germany
3  Center for Nanotechnology - Gievenbecker Weg 11, 48149 Münster, Germany

received 29 August 2005; accepted in final form 21 October 2005
published online 23 November 2005

We present results of a compact scanning transmission microscope (CSTXM) operated with laser-produced high-order-harmonic (HH) and laser plasma (LIP) radiation. When using relatively broadband radiation of a HH source (3 harmonics) a resolution of $< 1\un{\mu m}$ is achieved with $13\un{nm}$ light. Pictures containing $100\times 100$ pixels with about 1000 photons per pixel are generated in less than 1.5 hours with a $1\un{kHz}$ laser source and a dwell time of $500\un{ms}$ per pixel. Using a narrow-band emission line of a laser plasma source with the CSTXM $500\un{nm}$ structures of a test object were imaged at the laser plasma source with a dwell time of $250\un{ms}$.

07.85.Tt - X-ray microscopes.
41.50.+h - X-ray beams and X-ray optics.
42.65.Ky - Frequency conversion; harmonic generation, including higher-order harmonic generation.

© EDP Sciences 2005