EUV scanning transmission microscope operating with high-harmonic and laser plasma radiationR. Früke1, J. Kutzner2, 3, T. Witting2, 3, H. Zacharias2, 3 and Th. Wilhein1
1 University of Applied Sciences Koblenz, RheinAhrCampus Remagen Institute for X-optics - Südallee 2, 53424 Remagen, Germany
2 Westfälische Wilhelms-Universität Münster, Physikalisches Institut Wilhelm-Klemm-Straße 10, 48149 Münster, Germany
3 Center for Nanotechnology - Gievenbecker Weg 11, 48149 Münster, Germany
received 29 August 2005; accepted in final form 21 October 2005
published online 23 November 2005
We present results of a compact scanning transmission microscope (CSTXM) operated with laser-produced high-order-harmonic (HH) and laser plasma (LIP) radiation. When using relatively broadband radiation of a HH source (3 harmonics) a resolution of is achieved with light. Pictures containing pixels with about 1000 photons per pixel are generated in less than 1.5 hours with a laser source and a dwell time of per pixel. Using a narrow-band emission line of a laser plasma source with the CSTXM structures of a test object were imaged at the laser plasma source with a dwell time of .
07.85.Tt - X-ray microscopes.
41.50.+h - X-ray beams and X-ray optics.
42.65.Ky - Frequency conversion; harmonic generation, including higher-order harmonic generation.
© EDP Sciences 2005