Enhanced sputtering from nanoparticles and thin films: Size effectsT. T. Järvi, J. A. Pakarinen, A. Kuronen and K. Nordlund
Department of Physics, University of Helsinki - P.O. Box 43, FI-00014, Finland, EU
received 23 January 2008; accepted in final form 4 March 2008; published April 2008
published online 28 March 2008
Sputtering of gold nanoparticles and nanometer-thin films under 25 keV gallium-ion bombardment is shown, using molecular-dynamics simulations, to be significantly enhanced compared to bulk. The highest yield, about three times that of bulk gold, occurs for particles of about 8 nm in diameter. For thin films, the maximal yield is obtained for roughly 3 nm thick films. A model based on the work of Sigmund is presented to explain the size-dependence.
61.46.Df - Structure of nanocrystals and nanoparticles ("colloidal" quantum dots but not gate-isolated embedded quantum dots).
68.49.Sf - Ion scattering from surfaces (charge transfer, sputtering, SIMS).
61.82.Rx - Nanocrystalline materials.
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