Investigation of electron density and temperature in microwave plasma generated by a cylindrical Teflon waveguideZong-Fu Nie1, Feng Liu2, Qian-Hong Zhou1, Xi-Jiang Chang2, Shu-Yu Zhang1 and Rong-Qing Liang2
1 Institute of Modern Physics, Fudan University - Shanghai 200433, China
2 Department of Light Sources and Illuminating Engineering, Fudan University - Shanghai 200433, China
received 4 March 2009; accepted in final form 3 April 2009; published May 2009
published online 13 May 2009
A microwave plasma generated by a cylindrical Teflon waveguide has been developed in our laboratory. A cylindrical Teflon rod is to be as a dielectric waveguide for guiding a surface wave to excite the plasma around the rod. This kind of plasma source is expected to have some potential application, e.g. the process of the wall of a cylindrical workpiece. The density and temperature of the plasma, diagnosed by Langmuir probe, were compared with different incident power and pressure. Under the working gas pressure of 40 Pa, the density and temperature near the surface of the Teflon rod are about and 7 eV, respectively, and they decrease gradually away from the surface in the plasma chamber. The experiment results have been briefly discussed based on electromagnetic theory.
52.35.Hr - Electromagnetic waves (e.g., electron-cyclotron, Whistler, Bernstein, upper hybrid, lower hybrid).
52.50.Dg - Plasma sources.
© EPLA 2009