| Issue |
EPL
Volume 150, Number 2, April 2025
|
|
|---|---|---|
| Article Number | 26003 | |
| Number of page(s) | 7 | |
| Section | Condensed matter and materials physics | |
| DOI | https://doi.org/10.1209/0295-5075/adc153 | |
| Published online | 25 April 2025 | |
SAW pressure sensor based on 128° Y-X-cut lithium niobate ferroelectric thin film with XGBoost temperature compensation
Shanxi Key Laboratory of Ferroelectric Physical Micro-nano Devices and Systems, North University of China Taiyuan 030051, China
Received: 17 February 2025
Accepted: 17 March 2025
Pressure sensing is a fundamental aspect of industrial production where precise measurement of pressure in real time is essential. In this paper, we propose a surface acoustic wave (SAW) pressure sensor based on a 4 inch 128° Y-X-cut silicon-based single-crystal LiNbO3 film. Resonant frequency was measured as 91.66575 MHz at atmospheric pressure. The devices were capable of high sensitivity of 1027.32 ppm/MPa at 100 °C with linear behavior over the 0–100 kPa. And using XGBoost (eXtreme Gradient Boosting) to realize the temperature compensation calculation, the average error of the temperature compensation algorithm is 0.63% F.S. which serves to demonstrate the efficacy of this method. Based on its high sensitivity and high precision, the sensor has great prospects in the field of industrial production.
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