Issue |
Europhys. Lett.
Volume 42, Number 1, April 1998
|
|
---|---|---|
Page(s) | 25 - 30 | |
Section | Atomic, molecular and optical physics | |
DOI | https://doi.org/10.1209/epl/i1998-00547-6 | |
Published online | 01 September 2002 |
Depth profile analysis with monolayer resolution using elastic recoil detection (ERD)
Technische Universität München,
Physik-Department E12, D-85747 Garching, Germany
Received:
1
December
1997
Accepted:
3
February
1998
The conditions for obtaining optimum depth resolution in elastic recoil
detection (ERD) analysis of thin films using high-energy heavy ions are investigated.
We estimate the principle limits given by energy straggling and small-angle
scattering effects and show that monolayer depth resolution can be expected
under optimized experimental conditions. Such a resolution is demonstrated
in an ERD experiment for the first time by discrete signals of adjacent (002)
graphite layers which is obtained using a 60 MeV ion beam and
detecting
recoils with a magnetic spectrograph.
PACS: 34.50.Bw – Energy loss and stopping power / 07.81.+a – Electron, ion spectrometers, and related techniques / 61.66.Bi – Elemental solids
© EDP Sciences, 1998
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.