| Issue |
Europhys. Lett.
Volume 42, Number 1, April 1998
|
|
|---|---|---|
| Page(s) | 25 - 30 | |
| Section | Atomic, molecular and optical physics | |
| DOI | https://doi.org/10.1209/epl/i1998-00547-6 | |
| Published online | 01 September 2002 | |
Depth profile analysis with monolayer resolution using elastic recoil detection (ERD)
Technische Universität München,
Physik-Department E12, D-85747 Garching, Germany
Received:
1
December
1997
Accepted:
3
February
1998
The conditions for obtaining optimum depth resolution in elastic recoil
detection (ERD) analysis of thin films using high-energy heavy ions are investigated.
We estimate the principle limits given by energy straggling and small-angle
scattering effects and show that monolayer depth resolution can be expected
under optimized experimental conditions. Such a resolution is demonstrated
in an ERD experiment for the first time by discrete signals of adjacent (002)
graphite layers which is obtained using a 60 MeV 
ion beam and
detecting 
recoils with a magnetic spectrograph.
PACS: 34.50.Bw – Energy loss and stopping power / 07.81.+a – Electron, ion spectrometers, and related techniques / 61.66.Bi – Elemental solids
© EDP Sciences, 1998
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