Volume 49, Number 1, January I 2000
|Page(s)||14 - 19|
|Published online||01 September 2002|
Lehrstuhl für Biophysik, E22, Technische
James-Franck-Str. 1, D-85748 Garching, Germany
Accepted: 26 October 1999
We modified an optical microscope to enable quantitative ellipsometric studies with 1 nm height and 0.9 m lateral resolution. A beam of polarised light impinging on the object under a shallow angle of incidence is generated by focusing a pinhole into an off-axis point in the back focal plane of a high-power microscope objective. The entire image of the object is focused which greatly reduces stray light. In addition, this enables a drastic reduction of the measuring time. For thicknesses of organic films exceeding 20 nm both the film thickness and its refractive index may be determined simultaneously.
PACS: 07.60.Fs – Polarimeters and ellipsometers / 07.60.Pb – Conventional optical microscopes / 68.55.-a – Thin film structure and morphology
© EDP Sciences, 2000
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.