| Issue |
Europhys. Lett.
Volume 49, Number 1, January I 2000
|
|
|---|---|---|
| Page(s) | 14 - 19 | |
| Section | General | |
| DOI | https://doi.org/10.1209/epl/i2000-00113-x | |
| Published online | 01 September 2002 | |
Ellipsometric microscopy
Lehrstuhl für Biophysik, E22, Technische
Universität München
James-Franck-Str. 1, D-85748 Garching, Germany
Received:
9
August
1999
Accepted:
26
October
1999
We modified an optical microscope to enable quantitative ellipsometric
studies with 1 nm height and 0.9 
m lateral resolution. A beam of
polarised light impinging on the object under a shallow angle of
incidence is generated by focusing a pinhole into an off-axis point in
the back focal plane of a high-power microscope objective. The entire
image of the object is focused which greatly reduces stray light. In
addition, this enables a drastic reduction of the measuring time. For
thicknesses of organic films exceeding 20 nm both the film thickness
and its refractive index may be determined simultaneously.
PACS: 07.60.Fs – Polarimeters and ellipsometers / 07.60.Pb – Conventional optical microscopes / 68.55.-a – Thin film structure and morphology
© EDP Sciences, 2000
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