| Issue |
Europhys. Lett.
Volume 65, Number 5, March 2004
|
|
|---|---|---|
| Page(s) | 652 - 657 | |
| Section | Electromagnetism, optics, acoustics, heat transfer, classical mechanics, and fluid dynamics | |
| DOI | https://doi.org/10.1209/epl/i2003-10159-2 | |
| Published online | 01 February 2004 | |
-laser ablation and micro-patterning
of 
Angewandte Physik, Johannes-Kepler-Universität Linz - A-4040 Linz, Austria
Corresponding authors: Johannes.Pedarnig@jku.at Dieter.Baeuerle@jku.at
Received:
7
November
2003
Accepted:
11
December
2003
Pulsed-laser ablation and micro-patterning of gallium
orthophosphate () single crystals and ceramics by
157
-laser radiation is reported. Micron-sized
holes with sharp edges and smooth walls are obtained by employing
projection-mask techniques. The threshold fluence of ablation is
around 
and ablation rates
of 
are achieved at fluence levels
of 
for both material types.
PACS: 42.55.Lt – Gas lasers including excimer and metal-vapor lasers / 42.62.-b – Laser applications / 52.38.Mf – Laser ablation
© EDP Sciences, 2004
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