Volume 65, Number 5, March 2004
|Page(s)||652 - 657|
|Section||Electromagnetism, optics, acoustics, heat transfer, classical mechanics, and fluid dynamics|
|Published online||01 February 2004|
-laser ablation and micro-patterning of
Angewandte Physik, Johannes-Kepler-Universität Linz - A-4040 Linz, Austria
Corresponding authors: Johannes.Pedarnig@jku.at Dieter.Baeuerle@jku.at
Accepted: 11 December 2003
Pulsed-laser ablation and micro-patterning of gallium orthophosphate () single crystals and ceramics by 157 -laser radiation is reported. Micron-sized holes with sharp edges and smooth walls are obtained by employing projection-mask techniques. The threshold fluence of ablation is around and ablation rates of are achieved at fluence levels of for both material types.
PACS: 42.55.Lt – Gas lasers including excimer and metal-vapor lasers / 42.62.-b – Laser applications / 52.38.Mf – Laser ablation
© EDP Sciences, 2004
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