Volume 65, Number 5, March 2004
|Page(s)||652 - 657|
|Section||Electromagnetism, optics, acoustics, heat transfer, classical mechanics, and fluid dynamics|
|Published online||01 February 2004|
-laser ablation and micro-patterning of
Angewandte Physik, Johannes-Kepler-Universität Linz - A-4040 Linz, Austria
Accepted: 11 December 2003
Pulsed-laser ablation and micro-patterning of gallium orthophosphate () single crystals and ceramics by 157 -laser radiation is reported. Micron-sized holes with sharp edges and smooth walls are obtained by employing projection-mask techniques. The threshold fluence of ablation is around and ablation rates of are achieved at fluence levels of for both material types.
PACS: 42.55.Lt – Gas lasers including excimer and metal-vapor lasers / 42.62.-b – Laser applications / 52.38.Mf – Laser ablation
© EDP Sciences, 2004
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.