| Issue |
Europhys. Lett.
Volume 72, Number 6, December 2005
|
|
|---|---|---|
| Page(s) | 915 - 921 | |
| Section | General | |
| DOI | https://doi.org/10.1209/epl/i2005-10340-7 | |
| Published online | 23 November 2005 | |
EUV scanning transmission microscope operating with high-harmonic and laser plasma radiation
1
University of Applied Sciences Koblenz, RheinAhrCampus Remagen Institute for X-optics - Südallee 2, 53424 Remagen, Germany
2
Westfälische Wilhelms-Universität Münster, Physikalisches Institut Wilhelm-Klemm-Straße 10, 48149 Münster, Germany
3
Center for Nanotechnology - Gievenbecker Weg 11, 48149 Münster, Germany
Received:
29
August
2005
Accepted:
21
October
2005
We present results of a compact scanning transmission microscope (CSTXM) operated with laser-produced
high-order–harmonic (HH) and laser plasma (LIP) radiation. When using relatively broadband radiation of a HH
source (3 harmonics) a resolution of 
is achieved with 
light. Pictures containing
pixels with about 1000 photons per pixel are generated in less than 1.5 hours with a 
laser
source and a dwell time of 
per pixel. Using a narrow-band emission line of a laser plasma source
with the CSTXM 
structures of a test object were imaged at the laser plasma source with a dwell time
of 
.
PACS: 07.85.Tt – X-ray microscopes / 41.50.+h – X-ray beams and X-ray optics / 42.65.Ky – Frequency conversion; harmonic generation, including higher-order harmonic generation
© EDP Sciences, 2005
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