Volume 86, Number 3, May 2009
|Number of page(s)||4|
|Section||Physics of Gases, Plasmas and Electric Discharges|
|Published online||13 May 2009|
Investigation of electron density and temperature in microwave plasma generated by a cylindrical Teflon waveguide
Institute of Modern Physics, Fudan University - Shanghai 200433, China
2 Department of Light Sources and Illuminating Engineering, Fudan University - Shanghai 200433, China
Corresponding author: firstname.lastname@example.org
Accepted: 3 April 2009
A microwave plasma generated by a cylindrical Teflon waveguide has been developed in our laboratory. A cylindrical Teflon rod is to be as a dielectric waveguide for guiding a surface wave to excite the plasma around the rod. This kind of plasma source is expected to have some potential application, e.g. the process of the wall of a cylindrical workpiece. The density and temperature of the plasma, diagnosed by Langmuir probe, were compared with different incident power and pressure. Under the working gas pressure of 40 Pa, the density and temperature near the surface of the Teflon rod are about and 7 eV, respectively, and they decrease gradually away from the surface in the plasma chamber. The experiment results have been briefly discussed based on electromagnetic theory.
PACS: 52.35.Hr – Electromagnetic waves (e.g., electron-cyclotron, Whistler, Bernstein, upper hybrid, lower hybrid) / 52.50.Dg – Plasma sources
© EPLA, 2009
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