| Issue |
EPL
Volume 86, Number 3, May 2009
|
|
|---|---|---|
| Article Number | 35001 | |
| Number of page(s) | 4 | |
| Section | Physics of Gases, Plasmas and Electric Discharges | |
| DOI | https://doi.org/10.1209/0295-5075/86/35001 | |
| Published online | 13 May 2009 | |
Investigation of electron density and temperature in microwave plasma generated by a cylindrical Teflon waveguide
1
Institute of Modern Physics, Fudan University - Shanghai 200433, China
2
Department of Light Sources and Illuminating Engineering, Fudan University - Shanghai 200433, China
Corresponding author: rqliang@fudan.edu.cn
Received:
4
March
2009
Accepted:
3
April
2009
A microwave plasma generated by a cylindrical Teflon waveguide has been
developed in our laboratory. A cylindrical Teflon rod is to be as a dielectric waveguide
for guiding a surface wave to excite the plasma around the rod. This kind of plasma source
is expected to have some potential application, e.g. the process of the
wall of a cylindrical workpiece. The density and temperature of the plasma, diagnosed by
Langmuir probe, were compared with different incident power and pressure. Under the working
gas pressure of 40 Pa, the density and temperature near the surface of the Teflon
rod are about 
and 7 eV, respectively, and they decrease gradually away
from the surface in the plasma chamber. The experiment results have been briefly discussed based
on electromagnetic theory.
PACS: 52.35.Hr – Electromagnetic waves (e.g., electron-cyclotron, Whistler, Bernstein, upper hybrid, lower hybrid) / 52.50.Dg – Plasma sources
© EPLA, 2009
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