Volume 92, Number 3, November 2010
|Number of page(s)||5|
|Section||Condensed Matter: Structural, Mechanical and Thermal Properties|
|Published online||30 November 2010|
Tailoring strain in the SrTiO3 compound by low-energy He+ irradiation
Institut d'Electronique Fondamentale, IEF, UMR CNRS 8622, Université Paris Sud Bat. 220, F-91405 Orsay Cedex, France, EU
2 Laboratoire de Physique des Solides, UMR CNRS 8502, Université Paris-Sud F-91405 Orsay Cedex, France, EU
3 Centre de Spectrométrie Nucléaire et de Spectrométrie de Masse, CSNSM, UMR CNRS-IN2P3 8609, Université Paris Sud - F-91405 Orsay Cedex, France, EU
4 SPMS, UMR CNRS 8580, Ecole Centrale Paris - F-92295 Châtenay-Malabry, France, EU
Accepted: 25 October 2010
The ability to generate a change of the lattice parameter in a near-surface layer of a controllable thickness by ion implantation of strontium titanate is reported here using low-energy He+ ions. The induced strain follows a distribution within a typical near-surface layer of 200 nm as obtained from structural analysis. Due to the clamping effect from the underlying layer, only perpendicular expansion is observed. Maximum distortions up to 5–7% are obtained with no evidence of amorphisation at fluences of 1016 He+ ions/cm2 and ion energies in the range 10–30 keV.
PACS: 68.35.Gy – Mechanical properties; surface strains / 68.55.Ln – Defects and impurities: doping, implantation, distribution, concentration, etc. / 61.05.cp – X-ray diffraction
© EPLA, 2010
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