Tailoring strain in the SrTiO3 compound by low-energy He+ irradiation

S. Autier-Laurent; O. Plantevin; P. Lecoeur; B. Decamps; A. Gentils; C. Bachelet; O. Kaitasov; G. Baldinozzi

doi:10.1209/0295-5075/92/36005

All issues

Volume 92 / No 3 (November 2010)

EPL, 92 3 (2010) 36005

Abstract

Issue		EPL Volume 92, Number 3, November 2010


Article Number		36005
Number of page(s)		5
Section		Condensed Matter: Structural, Mechanical and Thermal Properties
DOI		https://doi.org/10.1209/0295-5075/92/36005
Published online		30 November 2010

EPL, 92 (2010) 36005

Tailoring strain in the SrTiO₃ compound by low-energy He⁺ irradiation

S. Autier-Laurent¹^,2, O. Plantevin³^a, P. Lecoeur¹, B. Decamps³, A. Gentils³, C. Bachelet³, O. Kaitasov³ and G. Baldinozzi⁴

¹ Institut d'Electronique Fondamentale, IEF, UMR CNRS 8622, Université Paris Sud Bat. 220, F-91405 Orsay Cedex, France, EU
² Laboratoire de Physique des Solides, UMR CNRS 8502, Université Paris-Sud F-91405 Orsay Cedex, France, EU
³ Centre de Spectrométrie Nucléaire et de Spectrométrie de Masse, CSNSM, UMR CNRS-IN2P3 8609, Université Paris Sud - F-91405 Orsay Cedex, France, EU
⁴ SPMS, UMR CNRS 8580, Ecole Centrale Paris - F-92295 Châtenay-Malabry, France, EU

^a plantevin@csnsm.in2p3.fr

Received: 5 July 2010
Accepted: 25 October 2010

Abstract

The ability to generate a change of the lattice parameter in a near-surface layer of a controllable thickness by ion implantation of strontium titanate is reported here using low-energy He⁺ ions. The induced strain follows a distribution within a typical near-surface layer of 200 nm as obtained from structural analysis. Due to the clamping effect from the underlying layer, only perpendicular expansion is observed. Maximum distortions up to 5–7% are obtained with no evidence of amorphisation at fluences of 10¹⁶ He⁺ ions/cm² and ion energies in the range 10–30 keV.

PACS: 68.35.Gy – Mechanical properties; surface strains / 68.55.Ln – Defects and impurities: doping, implantation, distribution, concentration, etc. / 61.05.cp – X-ray diffraction

© EPLA, 2010

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