Volume 95, Number 5, September 2011
|Number of page(s)||5|
|Section||Physics of Gases, Plasmas and Electric Discharges|
|Published online||10 August 2011|
Transition from E to H mode in inductively coupled oxygen plasma: Hysteresis and the behaviour of oxygen atom density
Jozef Stefan Institute - Jamova 39, 1000 Ljubljana, Slovenia, EU
Accepted: 13 July 2011
Transitions from E to H mode in electrodeless discharges created in pure oxygen at pressures from 10 Pa to 160 Pa are studied. An RF coil is placed at the centre of a long quartz tube and connected to an RF generator via a matching network. The generator operates at a frequency of 13.56 MHz and adjustable power up to 1200 W. The voltage and current on the coil are measured with a commercial voltage probe and a current probe connected to an oscilloscope, while the density of neutral O-atoms is measured with a catalytic probe. The results show the appearance of current and voltage hysteresis at moderately low pressure, the hysteresis being more pronounced at higher pressure. The O-atom density does not depend much on the mode at low pressure. As the pressure increases, a rapid increase of the O-atom density is observed at the transition between the E and the H mode. The hysteresis in the O-atom density is observed as well.
PACS: 52.70.Nc – Particle measurements / 52.70.Ds – Electric and magnetic measurements / 52.80.Pi – High-frequency and RF discharges
© EPLA, 2011
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.