Volume 99, Number 3, August 2012
|Number of page(s)||5|
|Section||Physics of Gases, Plasmas and Electric Discharges|
|Published online||09 August 2012|
Transport of electrons in Ar/H2 mixtures
Institute of Physics, University of Belgrade - POB 68, 11080 Belgrade, Serbia
Received: 22 February 2012
Accepted: 12 July 2012
In this work we present transport coefficients for electrons in Ar/H2 mixtures for the conditions used in plasma-assisted technologies for semiconductor production, i.e., in moderate and very high E/N. We used a two-term numerical solution of the Boltzmann equation at the lowest E/N (E is the electric field; N is the gas density) and correspondingly at the lowest mean energies. We also use the Monte Carlo simulation technique at moderate and high E/N. We show that a good agreement with experimental data exists for low and moderate E/N and that based on the tests for pure H2 and Ar we can model properly the swarm properties at high E/N. For the conditions of very high electric fields runaway peaks develop in the electron energy distribution function and appreciable contribution of backscattered high-energy electrons produces additional emission of Hα emission close to the anode (made of stainless steel). Results are obtained for abundances of H2 from 1% to 30%, which are necessary in kinetic models for this mixture in a number of applications.
PACS: 51.10.+y – Kinetic and transport theory of gases / 52.20.Hv – Atomic, molecular, ion, and heavy-particle collisions / 52.65.Pp – Monte Carlo methods
© EPLA, 2012
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.