Volume 131, Number 5, September 2020
|Number of page(s)||7|
|Section||Interdisciplinary Physics and Related Areas of Science and Technology|
|Published online||18 September 2020|
Resonant nano-electromechanical systems from 2D materials
State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University - Shanghai 200240, China
Received: 26 June 2020
Accepted: 26 August 2020
Intriguing mechanical properties of two-dimensional (2D) atomically thin materials make them well suit for a new class of resonant NEMS. Resonant 2D NEMS show high fundamental frequencies, outstanding tenability and broad dynamic range due to the ultrahigh strength, ultralow mass density and ultrahigh strain stretchability. Recent work toward exploring fabrication and transduction techniques, device performances and the nonlinear dynamic characteristics of 2D NEMS are summed up. Nonlinear dynamic behaviors including nonlinear mode coupling, nonlinear damping and nonlinear pull-in instability are reported in 2D NEMS.
PACS: 85.85.+j – Micro- and nano-electromechanical systems (MEMS/NEMS) and devices / 03.65.Sq – Semiclassical theories and applications / 05.45.-a – Nonlinear dynamics and chaos
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