| Issue |
EPL
Volume 139, Number 5, September 2022
|
|
|---|---|---|
| Article Number | 55002 | |
| Number of page(s) | 5 | |
| Section | Atomic, molecular and optical physics | |
| DOI | https://doi.org/10.1209/0295-5075/ac8761 | |
| Published online | 23 August 2022 | |
Harmonic calibration of quadrature phase interferometry
Univ Lyon, ENS de Lyon, CNRS, Laboratoire de Physique - F-69342 Lyon, France
(a) ludovic.bellon@ens-lyon.fr (corresponding author)
Received: 27 April 2022
Accepted: 5 August 2022
The two output signals of quadrature phase interferometers allow to benefit both from the high sensitivity of interferometry (working inside a fringe) and from an extended input range (counting fringes). Their calibration to reach a linear output is traditionally performed using Heydemann’s correction, which involves fitting one output versus the other by an ellipse. Here we present two alternative methods based on the linear response of the measurement to a sinusoidal input in time, which enables a direct calibration with an excellent linearity. A ten fold improvement with respect to the usual technique is demonstrated on an optical interferometer measuring the deflection of scanning force microscopy cantilevers.
© 2022 EPLA
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