Volume 141, Number 4, February 2023
|Number of page(s)||7|
|Section||Nuclear and plasma physics, particles and fields|
|Published online||15 February 2023|
Enhanced electron heating in the magnetic nozzle of a radio-frequency plasma via electron cyclotron resonance
Institut de Combustion, Aérothermique, Réactivité et Environnement, Centre National de la Recherche Scientifique 1C Avenue de la Recherche Scientifique, 45071 Orléans, France
(a) E-mail: email@example.com (corresponding author)
(b) E-mail: firstname.lastname@example.org
Received: 15 November 2022
Accepted: 6 February 2023
The effect of electron cyclotron resonance on the electron flow is experimentally examined in the magnetic nozzle of a radio-frequency plasma source powered at 13.56 MHz under a series of operating conditions. Measurements of the electron energy probability function show that the bulk of electrons is effectively heated when the external magnetic field meets the cyclotron resonance condition in the proximity of the antenna. A careful tuning of the magnetic field topology inside the plasma source leads to a gain in electron density and temperature up to about 20% and 40%, respectively.
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