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Ultra-thin high-quality silicon nitride films on Si(111)

J. Falta, Th. Schmidt, S. Gangopadhyay, T. Clausen, O. Brunke, J. I. Flege, S. Heun, S. Bernstorff, L. Gregoratti and M. Kiskinova
EPL, 94 1 (2011) 16003
Published online: 07 April 2011
DOI: 10.1209/0295-5075/94/16003

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