EPL

Transition from E to H mode in inductively coupled oxygen plasma: Hysteresis and the behaviour of oxygen atom density

R. Zaplotnik, A. Vesel and M. Mozetic

EPL, 95 5 (2011) 55001

Published online: 10 August 2011

DOI: 10.1209/0295-5075/95/55001

R. Zaplotnik

A. Vesel

M. Mozetic

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