EPL

High-speed/reliability multilevel FeFET memory with atomic-layer-deposited TiO₂ channel and HZO ferroelectric

Wei Meng, Binbin Luo, Linlong Yang, Xi Chen, Xiaohan Wu and Shi-Jin Ding

EPL, 152 5 (2025) 56002

Published online: 17 December 2025

DOI: 10.1209/0295-5075/ae23f5

Wei Meng

Binbin Luo

Linlong Yang

Xi Chen

Xiaohan Wu

Shi-Jin Ding

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