EPL

Simulation study of SiH₄ microdischarges in a narrow channel

L. Z. Tong, S. Yonemura, H. Takana and H. Nishiyama

EPL, 77 4 (2007) 45003

Published online: 02 February 2007

DOI: 10.1209/0295-5075/77/45003

L. Z. Tong

S. Yonemura

H. Takana

H. Nishiyama

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