EPL

Synthesis of α-Al₂O₃ thin films using reactive high-power impulse magnetron sputtering

E. Wallin, T. I. Selinder, M. Elfwing and U. Helmersson

EPL, 82 3 (2008) 36002

Published online: 23 April 2008

DOI: 10.1209/0295-5075/82/36002

E. Wallin

T. I. Selinder

M. Elfwing

U. Helmersson

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