EPL

Fluence effect on ion-implanted diffusion in relaxed

P. Laitinen, J. Räisänen, I. Riihimäki, J. Likonen and E. Vainonen-Ahlgren

Europhys. Lett., 72 3 (2005) 416-422

Published online: 07 October 2005

DOI: 10.1209/epl/i2005-10257-1

P. Laitinen

J. Räisänen

I. Riihimäki

J. Likonen

E. Vainonen-Ahlgren

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