EPL

Ion flux characteristics in high-power pulsed magnetron sputtering discharges

J. Vlček, P. Kudláček, K. Burcalová and J. Musil

EPL, 77 4 (2007) 45002

Published online: 02 February 2007

DOI: 10.1209/0295-5075/77/45002

J. Vlček

P. Kudláček

K. Burcalová

J. Musil

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