EPL

First results of high-resolution patterning by the ENEA laboratory-scale extreme ultraviolet projection lithography system

S. Bollanti, P. Di Lazzaro, F. Flora, L. Mezi, D. Murra and A. Torre

EPL, 84 5 (2008) 58003

Published online: 12 December 2008

DOI: 10.1209/0295-5075/84/58003

S. Bollanti

P. Di Lazzaro

F. Flora

L. Mezi

D. Murra

A. Torre

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