Ultra-thin high-quality silicon nitride films on Si(111) J. Falta, Th. Schmidt, S. Gangopadhyay, T. Clausen, O. Brunke, J. I. Flege, S. Heun, S. Bernstorff, L. Gregoratti and M. Kiskinova EPL, 94 1 (2011) 16003 Published online: 07 April 2011 DOI: 10.1209/0295-5075/94/16003