Vibrational analysis of compositional disorder in amorphous silicon carbon alloys
Dipartimento di Scienze Chimiche, V.le A.Doria 6, Catania 95125, Italy
2 Dipartimento di Fisica and Istituto Nazionale per la Fisica della Materia, Corso Italia 57, Catania, 95123 Italy
Accepted: 21 November 1997
Raman and Infrared spectroscopies have been used to characterise the compositional disorder in a- alloys. Samples with different carbon concentration have been prepared by ion implantation of carbon into a silicon matrix and have been annealed at different temperatures in order to follow the evolution of disorder. The obtained results show an increase of the magnitude of compositional disorder with carbon concentration and a reduction of such a disorder upon thermal treatments up to where it vanish during the amorphous-to-crystalline phase transition. A quantitative interpretation of the compositional disorder has been given as a function of the carbon concentration and annealing temperature.
PACS: 78.30.-j – Infrared and Raman spectra / 78.30.Ly – Disordered solids / 61.43.Dq – Amorphous semiconductors, metals, and alloys
© EDP Sciences, 1998