Europhys. Lett.
Volume 69, Number 5, March 2005
Page(s) 758 - 762
Section Physics of gases, plasmas and electric discharges
Published online 28 January 2005
Europhys. Lett., 69 (5), pp. 758-762 (2005)
DOI: 10.1209/epl/i2004-10420-2

The size distribution of $\chem{Si}$ nanoparticles prepared by pulsed-laser ablation in pure $\chem{He}$, $\chem{Ar}$ or $\chem{Ne}$ gas

G. S. Fu1, Y. L. Wang1, L. Z. Chu1, Y. Zhou1, W. Yu1, L. Han1 and Y. C. Peng2

1  College of Physics Science and Technology, Hebei University Baoding 071002, PRC
2  College of Electronic and Informational Engineering, Hebei University Baoding 071002, PRC

received 19 October 2004; accepted in final form 3 January 2005
published online 28 January 2005

Nanocrystalline silicon films were prepared by pulsed-laser ablation in high-purity $\chem{He}$, $\chem{Ar}$ or $\chem{Ne}$ gas at room temperature under a deposition pressure of 10$\un{Pa}$. The Raman and X-ray diffraction spectra indicate that the films are nanocrystalline. Scanning electron microscopy images show that $\chem{Ar}$ or $\chem{Ne}$ gas, compared to $\chem{He}$ gas, yields smaller and more uniform-sized $\chem{Si}$ nanoparticles at the same deposition conditions, which is also confirmed by the blue-shifted and narrower peaks obtained in photoluminescence measurement. $\chem{Ne}$ gas induces the smallest and most uniform, in size, $\chem{Si}$ nanoparticles among all the three gases, which may be attributed to a more effective energy transfer between $\chem{Si}$ and $\chem{Ne}$ atoms resulting from the adjacent degree of the atomic weights.

52.38.Mf - Laser ablation.
61.46.+w - Nanoscale materials: clusters, nanoparticles, nanotubes, and nanocrystals.
79.20.Ds - Laser-beam impact phenomena.

© EDP Sciences 2005