Morphology and growth mechanism of WOx films prepared by laser ablation of W in different atmospheresP. M. Ossi1, A. Bailini1, O. Geszti2 and G. Radnóczi2
1 Dipartmento di Chimica, Materiali e Ingegneria Chimica “Giulio Natta”, Politecnico di Milano - Milano, Italy, EU
2 Research Institute for Technical Physics and Materials Science - Budapest, Hungary, EU
received 5 June 2008; accepted in final form 8 August 2008; published September 2008
published online 12 September 2008
Nanostructured tungsten oxide, WOx films were prepared by ablating a metallic target in helium, argon and dry air as buffer gases at fixed pressure, laser fluence and target-substrate distance. The obtained samples were observed by transmission and high-resolution electron microscopy. The morphologies and structures of the films are discussed and compared to the predictions of a model that interprets cluster growth in an expanding ablation plume as a function of process parameters.
81.07.-b - Nanoscale materials and structures: fabrication and characterization.
52.38.Mf - Laser ablation.
68.37.Og - High-resolution transmission electron microscopy (HRTEM).
© EPLA 2008