Extinction of RF capacitive low-pressure dischargesV. Lisovskiy1, 2, J.-P. Booth1, S. Martins3, K. Landry3, D. Douai3 and V. Cassagne3
1 Laboratoire de Physique et Technologie des Plasmas, Ecole Polytechnique Palaiseau 91128, France
2 Department of Physics and Technology, Kharkov National University Kharkov 61077, Ukraine
3 Unaxis Displays Division France SAS - 5 rue Leon Blum Palaiseau 91120, France
received 23 May 2005; accepted 10 June 2005
published online 14 July 2005
Breakdown and extinction curves have been measured for RF capacitive low-pressure discharges in nitrogen and hydrogen at a frequency of 13.56 and discharge gaps between 6 and 25. In particular, the low-pressure, high-voltage region of the extinction curves is reported for the first time. The shape of the extinction curves was found to be similar to that of the breakdown curves. At sufficiently large gaps (L>10) the RF extinction voltage was found to be multi-valued in the low-pressure region, as is observed for the breakdown voltage. In this region, extinction can occur when the voltage is increased because the width of the two sheaths occupies the whole discharge space.
52.80.Pi - High-frequency and RF discharges.
© EDP Sciences 2005