Volume 82, Number 1, April 2008
Article Number 15001
Number of page(s) 5
Section Physics of Gases, Plasmas and Electric Discharges
Published online 17 March 2008
EPL, 82 (2008) 15001
DOI: 10.1209/0295-5075/82/15001

Similarity law for rf breakdown

V. Lisovskiy1, J.-P. Booth2, K. Landry3, D. Douai4, V. Cassagne5 and V. Yegorenkov6

1  Department of Physics and Technology, Kharkov National University - Kharkov 61077, Ukraine
2  Laboratoire de Physique et Technologie des Plasmas, Ecole Polytechnique - Palaiseau 91128, France, EU
3  Unaxis Displays Division France SAS - 5, Rue Leon Blum, Palaiseau 91120, France, EU
4  Association Euratom-CEA, Département de Recherches sur la Fusion Contrôlée, CEA - Cadarache, F-13108 Saint Paul lez Durance Cedex, France, EU
5  Riber - 31 rue Casimir Périer, 95873 Bezons, France, EU
6  Department of Physics, Kharkov National University - Kharkov 61077, Ukraine

received 4 January 2008; accepted in final form 15 February 2008; published April 2008
published online 17 March 2008

This paper demonstrates that the similarity law for the rf gas breakdown has the form $U_{rf}=\psi (p\cdot L,L/R,f\cdot L)$(where Urf is the rf breakdown voltage, p is the gas pressure, L and R are the length and diameter of the discharge tube, respectively, f is the frequency of the rf electric field). It means that two rf breakdown curves registered for narrow inter-electrode gaps or in geometrically similar tubes and depicted in the $U_{rf}(p\cdot L)$ graph will coincide only when the condition $f\cdot L={\rm const}$ is met. This similarity law follows from the rf gas breakdown equation and it is well supported by the results of measurements.

52.80.Pi - High-frequency and RF discharges.

© EPLA 2008