Similarity law for rf breakdownV. Lisovskiy1, J.-P. Booth2, K. Landry3, D. Douai4, V. Cassagne5 and V. Yegorenkov6
1 Department of Physics and Technology, Kharkov National University - Kharkov 61077, Ukraine
2 Laboratoire de Physique et Technologie des Plasmas, Ecole Polytechnique - Palaiseau 91128, France, EU
3 Unaxis Displays Division France SAS - 5, Rue Leon Blum, Palaiseau 91120, France, EU
4 Association Euratom-CEA, Département de Recherches sur la Fusion Contrôlée, CEA - Cadarache, F-13108 Saint Paul lez Durance Cedex, France, EU
5 Riber - 31 rue Casimir Périer, 95873 Bezons, France, EU
6 Department of Physics, Kharkov National University - Kharkov 61077, Ukraine
received 4 January 2008; accepted in final form 15 February 2008; published April 2008
published online 17 March 2008
This paper demonstrates that the similarity law for the rf gas breakdown has the form (where Urf is the rf breakdown voltage, p is the gas pressure, L and R are the length and diameter of the discharge tube, respectively, f is the frequency of the rf electric field). It means that two rf breakdown curves registered for narrow inter-electrode gaps or in geometrically similar tubes and depicted in the graph will coincide only when the condition is met. This similarity law follows from the rf gas breakdown equation and it is well supported by the results of measurements.
52.80.Pi - High-frequency and RF discharges.
© EPLA 2008